The Centre for Advanced Materials and Technologies (CEZAMAT) of Warsaw University of Technology is looking for partners in Horizon 2020.

CEZAMAT is a huge research facility erected with substantial support from EU; it provides 4 000 m2 of clean rooms of various classes of purity (10, 100 or 1000 acc to US FED STD 209E) and 2 000 m2 of additional lab space. CEZAMAT comprises five equipment platforms: Modelling and simulation platform, Platform of the technology of structures, devices and circuits, Platform for development of new materials, Biotechnology platform and Platform for diagnostics and characteristics of materials, structures, devices and circuits.

Of particular importance, the following equipment capable of processing 200nm wafers is available on site:

  • reactors for wafer cleaning and wet etching (Sicconex Batchspray Acid (25 Wafer) for Clean, Siconnex Batchspray Acid (25 Wafer) for Metal Etch)
  • furnaces for annealing, oxidation, doping and LPCVD ( 2 Thermco 2803 three tube Furnace systems)
  • electron beam lithography (Jeol JBX-9300FS)
  • photolitography equipment: mask aligner, hot plates, coater, developer, HMDS hot plate, mask cleaner (HP-200-Z HMDS, EVG101/200/C, HP-200-BT (soft bake), EVG620NT/200/TB, EVG101/200/D, HP-200-BT (hard bake), EVG Spin/Step SpinMask 300)
  • ion implanter (Ion Beam Services IMC 200),
  • inductively coupled plasma etching tool (RIE) (Oxford PlasmaPro 100 ICP Cobra)
  • Plasma-enhanced Chemical Vapor Deposition system (Oxford PlasmaPro 100 PECVD)
  • magnetron for reactive and dielectric sputtering (Oxford PlasmaLab System 400)
  • wafer bonder (EVG510/200″)
  • spectroscopic ellipsometer (Horiba UVISEL 2)
  • scanning electron microscopy with optical coupled microscope (Hitachi SEM SU8230 + PP3010TCRYO System, Carl Zeiss Auriga 60 with Axio Imager Vario.Z2)
  • laminar chambers,

The Centre for Advanced Materials and Technologies

The Centre for Advanced Materials and Technologies (CEZAMAT) of Warsaw University of Technology is one of the largest investments in Poland in the field of high-tech research and development. Co-funded by the European Union, the project envisages the establishment of the network of five laboratories equipped with state-of-the-art R&D tools. Laboratories of the Center allow to carry out new marketable technologies with commercial potential which are supposed to contribute to economic development. CEZAMAT investment has been completed in 2016. All laboratories are equipped with state-of-the-art technological and measurement tools and provide space with optimum technical conditions to conduct high-technology research. Depending on the needs, the laboratories offer different classes of clean rooms with high resistance to vibrations or electromagnetic radiation. Clean-rooms not only are characterized by a high class of air purity (10, 100 or 1000 according to US FED STD 209E norm), but are also equipped with the necessary technological utilities (ultrapure gases, also liquid ones, deionised water etc.). Organization of research work and space at CEZAMAT is conducive to carrying out interdisciplinary research and provides high flexibility as regards the topics of work. CEZAMAT comprises five equipment platforms.

Modelling and simulation platform modelling/simulating material properties (before their manufacturing), modelling/simulating the work of individual electronic, photonic and micromechanical devices (transistors, memory elements, sensors, vibrating beams, membranes etc.), modelling/simulating the course of technological processes (preliminary technology optimization), designing devices, circuits (e.g. electronic and/or photonic integrated circuits) and systems. This platform has appropriate software and high computation capacities, which provides for the possibility of running several complex computational tasks simultaneously.

Platform of the technology of structures, devices and circuits. Clean-rooms (class 10 to 1000) meet the most sophisticated requirements related to the nature of the research carried out there.  This does not only apply to extremely high air purity requirements, temperature and air humidity, but also to the purity of technological gases and chemical reagents. Laboratories enable the construction of various structures, devices and circuits – both electronic, photonic, as well as semiconductor microsystems, which can be applied in different areas of life, starting from communication (information transfer and processing), through transport, security, energy harvesting and management, and finally – health care. Due to mutual incompatibility of technologies and materials the platform was divided into the following zones: silicon-compatible technology, silicon-non-compatible technologies (alternative semiconductor materials), nanolithography (including electron beam lithography), ion implantation. Laboratories of this platform enable manufacturing of various structures, devices and circuits including: electronic, photonic, as well as MEMS/MOEMS.

Platform for development of new materials. The research theme of the platform for fabrication of materials (e.g. metals or organic compounds) focus on working out modern material technologies for the needs of micro-, nano- and optoelectronics. Due to mutual incompatibility of the researched materials the platform comprises two divisible laboratory zones. In the first zone, R&D on thick and thin film technologies, including unique inks fabrication and their application for printing devices and elements among others on textiles or other substrates. Labs comprising second zone are a place to work on the fabrication and applications of nanosuspensions, micro- and nanoaerozoles (solid and liquid), as well as filtration materials. In the future the obtained results can be applied in many areas, including, among the others, production of medicines. Scientists also work here on the hydrodynamics and transport of mass in chemical microreactors.

Bio engineering platform. This platform is dedicated to R&D related with the use of nanostructures, microstructures and functional materials for, among others, construction of biosensors and analytical microcircuits. Biosensors are applied in clinical analyses (e.g. disease markers, neurotransmitters), environmental analyses (e.g. heavy metals, pesticides), as well as industrial analysis. In particular this platform is dedicated to research on layers selectively sensitive to (bio)analytes, i.e. elements of structure that are decisive for the application of given sensors. The work is also aimed at functionalizing the surface of semiconductors, i.e. attaching different biologically important particles to inorganic surfaces, such as e.g. silicon.

Platform for diagnostics and characteristics of materials, structures, devices and circuits Every technological activity must be subject to assessment, both in terms of the expected parameters of materials, elements and systems, as well as their reliability and lifetime. Therefore, the Centre also comprises a dedicated platform for diagnostics and characterization. Thanks to measurements carried out with different methods it is possible to optimize materials, properties and technologies for manufacturing of devices and circuits. Scientists also work on the improvement of the existing measurement methods.

To find out more:

Please contact : Patrycja Smoleńska


The main goal of the Center is to create a common platform for initiating and stimulating interdisciplinary projects. The research will include, among others, such disciplines as: nanotechnology, micro- and nanoelectronics or microsystems (MOEMS) and advanced materials, e.g. graphene. Projects implemented by CEZAMAT will be oriented on the practical use of their results – from the idea through research, creation of a prototype to the stage of industrial implementation. The effects of the work will be used, among others in the ICT, medical, defense, automotive or aerospace industries.



The research conducted at CEZAMAT will deal with issues related to Wireless Sensor Networks, which is the basis of the Internet of Things concept (IoT), which is currently the most dynamically developing branch of science and technology. It is a concept according to which objects can directly or indirectly collect, process or exchange data via a network of communicating sensors. An important element of IoT are MOEMS (Micro-Opto-Electro-Mechanical Systems). These are complicated, miniaturized optical-electro-mechanical devices, most often produced on the basis of semiconductor materials, mainly silicon. Their dimensions range from individual to hundreds of micrometers. The scope of application of IoT covers areas such as: energy, environment, telecommunications, transport, food, information, security.

CEZAMAT wants to be part of the Internet of Things trend, which is why it will prioritize the most promising, innovative research directions in this field. Belong to them:

– Photonics, optoelectronics and photovoltaics

– Biosensors and chemical sensors

– MOEMS, NEMS, activators and detectors

– Acquiring energy from the environment and its storage

– Piezoelectricity, artificial photosynthesis and fuel cells

– Housings, data integration in three-dimensional space and heterogeneous systems

– Analog and digital design, circuit design, system solutions for Internet of Things and WSN

– New semiconductor materials and 2-D, bio and organic composites, materials and metamaterials

– Nanotubes, graphene, GaN, SiC

– Imaging and spectroscopy, THz, high frequency and holography

– Communication, in particular wireless and wireless charging

– Information – security, processing, coding and analysis

– Software development.


– Co-implementation of the objectives of balanced economic development

– Building interdisciplinary teams and promoting synergy

– Creating a bridge between research and business

– Creating an ecosystem that supports entrepreneurship and innovative start-ups

– Access to clean-room, know-how and laboratories.

Support for the Polish economy through the implementation of strategic activities, such as:

– Research on modern materials, devices and technologies for the Internet of Things

– Inspiring innovative ideas

– Creating mechanisms for industrial implementations

– Presenting groundbreaking visions of products

– Creating incubators and a start-up friendly environment.

CEZAMAT PW Sp. z o.o.

CEZAMAT PW Sp. z o.o. is a special purpose company established by the Warsaw University of Technology to carry out the project of the Center of Advanced Materials and Technologies, co-financed from the European Regional Development Fund under the Innovative Economy Operational Program. It is one of the largest investments in Poland in the field of research and development. The CEZAMAT Central Laboratory created in Warsaw Ursynów will occupy an area of almost 20,000 m2.

Current project:

Project Number: 692519

Project Acronym: PRIME

Project title: Ultra-Low PoweR technologIes and MEmory architectures for IoT

Project duration: December, 1st 2015 – September 30th 2019

The goal of the PRIME project is to establish an open ultra-low power technology platform containing all necessary design and architecture blocks and components which could enable the European industry to increase and strengthen their competitive and leading eco-system and benefit from market opportunities created by the Internet of Things (IoT) revolution.


To develop low power sensor that communicate wirelessly exchanging small amount with data within the mesh of network and delegating processing solely to the sensor notes. Possible applications of such a novel architecture are: traffic monitoring, local imitrocognition etc. We want to achieve our goal by exploiting low power microcontrollers with firmware artificial intelligence (AI) algorithms.

To reach the goal of multidisciplinary and innovative entity of research and development, we are interested in the following applications where we can participate especially as a partners or can lead the projects within strategic research and commerce areas:

Fast Track to Innovation (FTI) EIC-FTI-2018-2020

Cloud Computing ICT-15-2019-2020

Computing technologies and engineering methods for cyber-physical systems of systemsICT-01-2019

Next Generation Internet – An Open Internet Initiative ICT-24-2018-2019

Big data solutions for energy DT-ICT-11-2019

Smart Anything Everywhere DT-ICT-01-2019

Cluster facilitated projects for new industrial value chains INNOSUP-01-2018-2020

Please contact Patrycja Smoleńska: